Abstract
On the basis of experiments for air, the dependence of the flow coefficient α of the watchstones as throttles on the diameter of their passage hole was obtained. The deviation of the calculated value of α from the experimentally determined value is 0.45 %. Also, for a throttle with a diameter of 0.083 mm, the dependence of α for different types of gases was obtained. The use of the obtained dependencies will improve the characteristics of the designed sensors for nanotechnology process control systems.
Keywords (in English)
Manuscript file