Study of gas-dynamic throttle elements as sensors for nanotechnology processes

On the basis of experiments for air, the dependence of the flow coefficient α of the watchstones as throttles on the diameter of their passage hole was obtained. The deviation of the calculated value of α from the experimentally determined value is 0.45 %. Also, for a throttle with a diameter of 0.083 mm, the dependence of α for different types of gases was obtained. The use of the obtained dependencies will improve the characteristics of the designed sensors for nanotechnology process control systems.